ClassOne Technology, a global provider of electroplating and wet processing tools for microelectronics manufacturing, has announced that VTT Technical Research Centre of Finland has placed an order for its ClassOne Solstice S8 single-wafer system. VTT will use the system for advanced through-silicon via (TSV) processes in various applications, including MEMS packaging and 3D integration of sensor chips and quantum computing.
The Solstice S8 system offers production-proven electroplating capabilities, allowing VTT to perform copper TSV plating using advanced electrolyte chemistries and atomic layer deposition (ALD) seed layers. This will enable VTT to develop contemporary solutions for critical TSV and damascene processes.
According to industry research firm Yole Group, the advanced packaging sector is expected to experience a compound annual growth rate of 10% between 2022 and 2028, reaching over $78 billion by 2028. The primary market drivers are shifting, with automotive and telecoms gaining share while mobile and consumer decrease. Flip-chip, 2.5D/3D, and system-in-package (SiP) technologies are expected to dominate the advanced packaging market by 2028.
The Solstice S8 system from ClassOne combines multiple process technologies and chemistries in a compact configuration, making it suitable for advanced chip packaging applications. VTT’s Solstice S8 system chambers will include Vacuum Prewet for high-aspect-ratio features, CopperMax and Copper Gen4 ECD for plating, and spin-rinse-dry (SRD) for post-plating wafer drying.
Byron Exarcos, CEO of ClassOne Technology, expressed excitement about VTT becoming a new customer for the Solstice platform. He noted the increased interest in advanced packaging technologies from institutions and universities, emphasizing the importance of VTT’s work in developing new capabilities for the future of microelectronics manufacturing.
The Solstice platform offers flexible operation, combining automation with manual operation, making it suitable for both R&D and pilot-line use. VTT plans to provide access to the tool for qualified customers who require Solstice’s capabilities to advance their production efforts. The Solstice S8 system will be shipped to VTT’s facility in Espoo, Finland.
Source: [3D InCites](https://www.3dincites.com/2023/11/classone-technology-receives-order-for-solstice-s8-single-wafer-system-from-finlands-vtt-technical-research-centre/)
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